Patent Assignment
Reel/Frame 055463/0480
Assignment of Assignor's Interest
Recorded: 2021-03-02
Pages: 4
Assignors
TAMURA, HAJIME
Executed: 2021-02-19
SASAKI, YASUHARU
Executed: 2021-02-19
YAMAGUCHI, SHIN
Executed: 2021-02-19
SUGAWARA, TSUGUTO
Executed: 2021-02-19
KOIZUMI, KATSUYUKI
Executed: 2021-02-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Support and Plasma Processing Apparatus