Patent Assignment
Reel/Frame 055473/0082
Assignment of Assignor's Interest
Recorded: 2021-03-03
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME,, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing System and Edge Ring Replacement Method