Patent Assignment
Reel/Frame 055480/0596
Assignment of Assignor's Interest
Recorded: 2021-03-03
Pages: 4
Assignors
KAWAGUCHI, KENJI
Executed: 2021-01-25
ENDO, TORU
Executed: 2021-01-25
TANIKAWA, KOTA
Executed: 2021-01-25
Assignee
SCREEN HOLDINGS CO., LTD.
1-1, TENJINKITA-MACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Device and Substrate Processing Method