Patent Assignment
Reel/Frame 055485/0953
Assignment of Assignor's Interest
Recorded: 2021-03-04
Pages: 4
Assignors
WAKITA, ASUKA
Executed: 2021-02-02
SAWAZAKI, NAOKI
Executed: 2021-02-02
OTA, TAKASHI
Executed: 2021-02-03
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI,, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Learned Model Generating Method, Abnormality Factor Estimating Device, Substrate Processing Device, Abnormality Factor Estimating Method, Learning Method, Learning Device, and Learning Data Generating Method