Patent Assignment
Reel/Frame 055495/0311
Assignment of Assignor's Interest
Recorded: 2021-03-04
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gas Inspection Method, Substrate Processing Method, and Substrate Processing System