Patent Assignment
Reel/Frame 055505/0915
Assignment of Assignor's Interest
Recorded: 2021-03-05
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Inspection Method and Plasma Processing Apparatus