Patent Assignment
Reel/Frame 055520/0556
Assignment of Assignor's Interest
Recorded: 2021-03-08
Pages: 3
Assignor
CLARK, ROBERT
Executed: 2021-02-25
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Atomic Layer Etching of Metal Oxides