Patent Assignment
Reel/Frame 055524/0390
Assignment of Assignor's Interest
Recorded: 2021-03-08
Pages: 3
Assignors
AMIKURA, NORIHIKO
Executed: 2021-03-03
DOGOME, MASAHIRO
Executed: 2021-03-03
KITA, MASATOMO
Executed: 2021-03-08
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer System and Load Lock Module