Patent Assignment
Reel/Frame 055534/0163
Assignment of Assignor's Interest
Recorded: 2021-03-09
Pages: 10
Assignors
KIM, MINHO
Executed: 2021-02-04
HAN, HAKSEUNG
Executed: 2021-02-04
KIM, JIYOUNG
Executed: 2021-02-10
PARK, JINBACK
Executed: 2021-02-04
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus and Method of Measuring Uniformity Based on Pupil Image and Method of Manufacturing Mask by Using the Method