Patent Assignment
Reel/Frame 055564/0872
Assignment of Assignor's Interest
Recorded: 2021-03-11
Pages: 4
Assignors
HSIUNG, TE-CHIH
Executed: 2021-02-25
WU, JYUN-DE
Executed: 2021-02-25
WANG, PENG
Executed: 2021-02-25
LIN, HUAN-JUST
Executed: 2021-02-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 200-78, TAIWAN
Covered Property
(1)
Etch Profile Control of Gate Contact Opening