Patent Assignment
Reel/Frame 055566/0060
Assignment of Assignor's Interest
Recorded: 2021-03-11
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Backside Deposition Tuning of Stress to Control Wafer Bow in Semiconductor Processing