Patent Assignment
Reel/Frame 055576/0162
Assignment of Assignor's Interest
Recorded: 2021-03-12
Pages: 4
Assignors
NAGAI, KENJI
Executed: 2021-03-11
NAGASAKI, HIDEAKI
Executed: 2021-03-11
SUZUKI, SATOSHI
Executed: 2021-03-11
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Light Interference System and Substrate Processing Apparatus