Patent Assignment
Reel/Frame 055586/0101
Assignment of Assignor's Interest
Recorded: 2021-03-15
Pages: 4
Assignor
INABA, SHOUGO
Executed: 2021-03-08
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Coating Film Forming Method and Coating Film Forming Apparatus