Patent Assignment
Reel/Frame 055628/0597
Assignment of Assignor's Interest
Recorded: 2021-03-17
Pages: 4
Assignors
CHEN, CHEN-TAI
Executed: 2020-10-19
LIN, JING-RAN
Executed: 2020-10-19
YANG, JER-SHIEN
Executed: 2020-10-19
CHEN, HUNG-WEN
Executed: 2020-10-19
KUO, I-LING
Executed: 2020-10-19
CHIANG, YU-HSUN
Executed: 2020-10-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Systems and Methods for Determining Residual Compounds in Plasma Process
Application:
17/027,508 →
Publication:
US 2022/0093429