Patent Assignment
Reel/Frame 055649/0935
Assignment of Assignor's Interest
Recorded: 2021-03-19
Pages: 3
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Device for Characterizing the Surface Shape of an Optical Element