Patent Assignment
Reel/Frame 055673/0182
Assignment of Assignor's Interest
Recorded: 2021-03-22
Pages: 6
Assignors
MIYASHITA, KOICHI
Executed: 2021-03-05
HORIKAWA, MAKOTO
Executed: 2021-03-16
GOMI, SATOSHI
Executed: 2021-03-16
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Substrate Processing System, Substrate Processing Method, and Controller