Patent Assignment
Reel/Frame 055696/0098
Assignment of Assignor's Interest
Recorded: 2021-03-24
Pages: 5
Assignor
OKADA, MOTOI
Executed: 2021-01-08
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Abnormality Detection Apparatus and Abnormality Detection Method