Patent Assignment
Reel/Frame 055713/0053
Assignment of Assignor's Interest
Recorded: 2021-03-25
Pages: 8
Assignors
VENTZEK, PETER
Executed: 2021-03-17
OHATA, MITSUNORI
Executed: 2021-03-25
RANJAN, ALOK
Executed: 2021-03-19
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Fast Neutral Generation for Plasma Processing