Patent Assignment
Reel/Frame 055743/0923
Assignment of Assignor's Interest
Recorded: 2021-03-27
Pages: 4
Assignors
YEH, TSE-AN
Executed: 2020-11-23
ZHENG, JUN-FEI
Executed: 2020-12-28
LEAVY, MONTRAY
Executed: 2020-12-30
CHEN, CHUN KUANG
Executed: 2020-12-28
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Phase-Shift Reticle for Use in Photolithography
Application:
63/116,423 →