IP Library › Patent Application 63116423
Patent Application Provisional
App. No. 63/116,423 · Confirmation No. 3848

PHASE-SHIFT RETICLE FOR USE IN PHOTOLITHOGRAPHY

Applicant: ENTEGRIS, INC.
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2020-12-10 APP.FILE.REC Filing Receipt 3 View
2020-11-20 PA.. Power of Attorney 1 View
2020-11-20 TR.PROV Provisional Cover Sheet (SB16) 4 View
2020-11-20 TRAN.LET Transmittal Letter 2 View
2020-11-20 DRW.NONBW Drawings-other than black and white line drawings 18 View
2020-11-20 ADS Application Data Sheet 9 View
2020-11-20 ABST Abstract 1 View
2020-11-20 CLM Claims 3 View
2020-11-20 SPEC Specification 25 View
2020-11-20 WFEE Fee Worksheet (SB06) 2 View
2020-11-20 N417 Electronic Filing System Acknowledgment Receipt 3 View
2020-11-20 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2020-11-20 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
63/116,423
Filed
2020-11-20