Patent Assignment
Reel/Frame 055754/0314
Assignment of Assignor's Interest
Recorded: 2021-03-29
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method and Structures for Acoustic Wave Overlay Error Determination