Patent Assignment
Reel/Frame 055761/0335
Assignment of Assignor's Interest
Recorded: 2021-03-30
Pages: 4
Assignors
NAOHARA, HIDEJI
Executed: 2021-03-23
OKITA, YUJI
Executed: 2021-03-23
KAKUMA, HIROAKI
Executed: 2021-03-23
MASUI, TATSUYA
Executed: 2021-03-24
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method