Patent Assignment
Reel/Frame 055779/0305
Assignment of Assignor's Interest
Recorded: 2021-03-31
Pages: 5
Assignors
CHENG, CHUN-WEN
Executed: 2019-08-30
CHU, CHIA-HUA
Executed: 2019-08-30
KUO, WEN CHENG
Executed: 2019-08-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Support Structure for Mems Device with Particle Filter