Patent Assignment
Reel/Frame 055792/0579
Assignment of Assignor's Interest
Recorded: 2021-04-01
Pages: 3
Assignors
TRAN, TOAN Q.
Executed: 2016-02-22
PARK, SOONAM
Executed: 2016-02-22
KIM, JUNGHOON
Executed: 2016-02-22
LUBOMIRSKY, DMITRY
Executed: 2016-02-22
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Process Chamber for Cyclic and Selective Material Removal and Etching