Patent Assignment
Reel/Frame 055797/0974
Assignment of Assignor's Interest
Recorded: 2021-04-01
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Cleaning Method and Apparatus