Patent Assignment
Reel/Frame 055808/0001
Assignment of Assignor's Interest
Recorded: 2021-04-01
Pages: 66
Assignors
KAMIMURA, DAIGI
Executed: 2021-03-22
TANIYAMA, TOMOSHI
Executed: 2021-03-23
SHIRAKO, KENJI
Executed: 2021-03-22
SHIMADA, HIRONARI
Executed: 2021-03-22
HORII, AKIRA
Executed: 2021-03-22
NAKADA, TAKAYUKI
Executed: 2021-03-22
YAMASHITA, NORIHIRO
Executed: 2021-03-26
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.