Patent Assignment
Reel/Frame 055823/0879
Assignment of Assignor's Interest
Recorded: 2021-04-05
Pages: 7
Assignors
MORIURA, TAKUYA
Executed: 2021-02-25
SOTOZAKI, HIROSHI
Executed: 2021-02-25
SONE, TADAKAZU
Executed: 2021-02-25
ITO, MASAYOSHI
Executed: 2021-02-25
KOBATA, ITSUKI
Executed: 2021-02-25
MATSUO, HISANORI
Executed: 2021-03-01
TERADA, TETSUYA
Executed: 2021-02-25
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Apparatus for Polishing, Processing System, and Method of Polishing