Patent Assignment
Reel/Frame 055836/0360
Assignment of Assignor's Interest
Recorded: 2021-04-06
Pages: 6
Assignors
DRUMMOND, STEVEN T.
Executed: 2021-04-01
COLVIN, NEIL
Executed: 2021-04-05
SILVERSTEIN, PAUL
Executed: 2021-03-31
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Ion Source Repeller