Patent Assignment
Reel/Frame 055841/0770
Assignment of Assignor's Interest
Recorded: 2021-04-06
Pages: 7
Assignors
RUFFELL, SIMON
Executed: 2015-07-14
HAUTALA, JOHN
Executed: 2015-07-14
BRAND, ADAM
Executed: 2015-07-24
DAI, HUIXIONG
Executed: 2015-07-20
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Techniques to Engineer Nanoscale Patterned Features Using Ions