Patent Assignment
Reel/Frame 055843/0327
Assignment of Assignor's Interest
Recorded: 2021-04-06
Pages: 5
Assignors
CHEN, TAI-YU
Executed: 2020-09-30
KHIVSARA, SAGAR DEEPAK
Executed: 2020-09-30
LIU, KUO-AN
Executed: 2020-09-30
HSIEH, CHIEH
Executed: 2020-09-30
CHIEN, SHANG-CHIEH
Executed: 2020-09-30
CHANG, GWAN-SIN
Executed: 2020-09-30
LAM, KAI TAK
Executed: 2020-09-30
CHEN, LI-JUI
Executed: 2020-10-05
LIU, HENG-HSIN
Executed: 2020-10-05
WU, CHUNG-WEI
Executed: 2020-09-30
WU, ZHIQIANG
Executed: 2020-09-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
System and Method for Performing Extreme Ultraviolet Photolithography Processes