Patent Assignment
Reel/Frame 055867/0172
Assignment of Assignor's Interest
Recorded: 2021-04-08
Pages: 3
Assignor
ASHIZAWA, NORITAKA
Executed: 2021-03-12
Assignee
USHIO DENKI KABUSHIKI KAISHA
1-6-5, MARUNOUCHI, CHIYODA-KU, TOKYO, 100-8150, JAPAN
Covered Property
(1)
Extreme Ultraviolet Light Source Apparatus and Plasma Position Adjusting Method