Patent Assignment
Reel/Frame 055878/0298
Assignment of Assignor's Interest
Recorded: 2021-04-09
Pages: 6
Assignee
GIGAPHOTON INC.
400, OAZA YOKOKURASHINDEN, OYAMA-SHI, TOCHIGI, 3238558, JAPAN
Covered Property
(1)
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.