Patent Assignment
Reel/Frame 055930/0932
Assignment of Assignor's Interest
Recorded: 2021-04-15
Pages: 3
Assignor
CHEN, CHIEN-CHIH
Executed: 2021-03-31
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Photoresist Composition and Method of Manufacturing a Semiconductor Device
Application:
17/231,413 →
Publication:
US 2021/0389670