Patent Assignment
Reel/Frame 055932/0623
Assignment of Assignor's Interest
Recorded: 2021-04-15
Pages: 4
Assignors
TANG, HAN-YU
Executed: 2021-04-05
CHANG, HUNG-TAI
Executed: 2021-04-05
YU, MING-HUA
Executed: 2021-04-15
YEO, YEE-CHIA
Executed: 2021-04-05
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method of Forming a Multi-Layer Epitaxial Source/Drain Region having Varying Concentrations of Boron and Germanium therein