Patent Assignment
Reel/Frame 055969/0193
Assignment of Assignor's Interest
Recorded: 2021-04-20
Pages: 4
Assignors
LIANG, QIWEI
Executed: 2021-04-04
BUCHBERGER, DOUGLAS ARTHUR, JR.
Executed: 2021-04-09
PISHARODY, GAUTAM
Executed: 2021-04-02
LUBOMIRSKY, DMITRY
Executed: 2021-04-04
ATHANI, SHEKHAR
Executed: 2021-04-04
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor Process Chamber