Patent Assignment
Reel/Frame 055984/0504
Assignment of Assignor's Interest
Recorded: 2021-04-21
Pages: 3
Assignor
ANUNCIADO, ROY
Executed: 2018-11-19
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Determining the Contribution of a Processing Apparatus to a Substrate Parameter