Patent Assignment
Reel/Frame 055992/0762
Assignment of Assignor's Interest
Recorded: 2021-04-21
Pages: 3
Assignors
YUAN, GUANGBI
Executed: 2019-10-11
NARKEVICIUTE, IEVA
Executed: 2019-10-15
GONG, BO
Executed: 2019-10-11
VARADARAJAN, BHADRI N.
Executed: 2019-10-14
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Doped or Undoped Silicon Carbide Deposition and Remote Hydrogen Plasma Exposure for Gapfill