Patent Assignment
Reel/Frame 055992/0792
Assignment of Assignor's Interest
Recorded: 2021-04-21
Pages: 4
Assignors
SINGHAL, AKHIL
Executed: 2019-10-09
SMITH, DAVID CHARLES
Executed: 2019-11-08
LEESER, KARL FREDERICK
Executed: 2019-10-17
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
In Situ Protective Coating of Chamber Components for Semiconductor Processing