Patent Assignment
Reel/Frame 055999/0763
Assignment of Assignor's Interest
Recorded: 2021-04-22
Pages: 14
Assignors
MORI, HIROTOSHI
Executed: 2021-04-12
KAWAGUCHI, YOSHIHIRO
Executed: 2021-04-16
HISANO, KAZUYA
Executed: 2021-04-15
TANOUE, HAYATO
Executed: 2021-04-08
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method