Patent Assignment
Reel/Frame 056009/0287
Assignment of Assignor's Interest
Recorded: 2021-04-22
Pages: 6
Assignors
MOYAMA, KAZUKI
Executed: 2021-02-18
NAGASEKI, KAZUYA
Executed: 2021-02-18
MATSUDA, TOSHIYA
Executed: 2021-02-24
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Processing System and Method Using Transporting Device Facilitating Replacement of Consumable Part