Patent Assignment
Reel/Frame 056027/0675
Assignment of Assignor's Interest
Recorded: 2021-04-23
Pages: 10
Assignors
KAWAKAMI, SATORU
Executed: 2021-04-15
MITSUNARI, TADASHI
Executed: 2021-04-15
IWASHITA, SHINYA
Executed: 2021-04-16
SUZUKI, YUSUKE
Executed: 2021-04-15
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method