Patent Assignment
Reel/Frame 056044/0459
Assignment of Assignor's Interest
Recorded: 2021-04-26
Pages: 4
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method and Apparatus for Diffraction-Based Overlay Measurement