Patent Assignment
Reel/Frame 056053/0279
Assignment of Assignor's Interest
Recorded: 2021-04-27
Pages: 4
Assignors
TANAKA, IKKO
Executed: 2021-04-23
LI, LIFU
Executed: 2021-04-23
TSUJIMOTO, HIROSHI
Executed: 2021-04-23
TERASAWA, ATSUSHI
Executed: 2021-04-23
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME,, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Control Method of Substrate Processing Apparatus