Patent Assignment
Reel/Frame 056053/0529
Assignment of Assignor's Interest
Recorded: 2021-04-27
Pages: 7
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method