Patent Assignment
Reel/Frame 056058/0691
Assignment of Assignor's Interest
Recorded: 2021-04-27
Pages: 4
Assignors
WU, TSUNG-CHENG
Executed: 2021-02-01
WU, SHENG-YING
Executed: 2021-02-01
LIN, MING-HSIEN
Executed: 2021-02-22
CHEN, CHUN FU
Executed: 2021-02-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Apparatus and Method of Manufacturing a Semiconductor Device