Patent Assignment
Reel/Frame 056072/0021
Assignment of Assignor's Interest
Recorded: 2021-04-28
Pages: 5
Assignors
FU, SHIDONG
Executed: 2021-04-27
HUANG, RAN
Executed: 2021-04-27
JIANG, BOHAN
Executed: 2021-04-27
XU, YING
Executed: 2021-04-27
Assignee
SHANGHAI HUALI INTEGRATED CIRCUIT CORPORATION
NO. 6 LIANGTENG ROAD, PUDONG NEW AREA, SHANGHAI, 201314, CHINA
Covered Property
(1)
Method for Etching Back Hard Mask Layer on Tops of Dummy Polysilicon Gates in Gate Last Process