Patent Assignment
Reel/Frame 056118/0901
Assignment of Assignor's Interest
Recorded: 2021-05-03
Pages: 7
Assignors
KIM, DONGHWAN
Executed: 2021-04-12
KIM, WOOSUNG
Executed: 2021-04-12
PARK, GUNWOO
Executed: 2021-04-12
SEO, KI-BONG
Executed: 2021-04-12
JEONG, JANG-HWAN
Executed: 2021-04-12
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Photomask, Exposure Apparatus, and Method of Fabricating Three-Dimensional Semiconductor Memory Device Using the Same