Patent Assignment
Reel/Frame 056119/0695
Assignment of Assignor's Interest
Recorded: 2021-05-03
Pages: 5
Assignors
WANG, SHAO-HUA
Executed: 2021-03-24
KUO, CHUEH-CHI
Executed: 2021-03-21
HO, KUEI-LIN
Executed: 2021-04-13
YANG, ZONG-YOU
Executed: 2021-03-21
SUN, CHENG-WEI
Executed: 2021-04-14
CHEN, WEI-YUAN
Executed: 2021-04-21
CHEN, CHENG-CHIEH
Executed: 2021-03-24
LIU, HENG-HSIN
Executed: 2021-03-18
CHEN, LI-JUI
Executed: 2021-03-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Lithography System and Method Thereof