Patent Assignment
Reel/Frame 056131/0633
Assignment of Assignor's Interest
Recorded: 2021-05-04
Pages: 19
Assignors
SUNG, TSAI WEN
Executed: 2019-12-02
YANG, MICHAEL X.
Executed: 2020-04-06
YAN, CHUN
Executed: 2018-01-15
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Spacer Etching Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.