Patent Assignment
Reel/Frame 056131/0973
Assignment of Assignor's Interest
Recorded: 2021-05-04
Pages: 5
Assignors
WANG, PEI-HSUN
Executed: 2021-04-09
CHIANG, KUO-CHENG
Executed: 2020-08-14
WANG, CHIH-HAO
Executed: 2020-08-26
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method of Forming Self-Aligned Source/Drain Metal Contacts